G.V. Kurdyumov金属物理研究院,乌克兰国家科学院
期刊
会议
图书
作者:Yu. O. Kosminska, V. I. Perekrestov, G. S. Kornyushchenko
来源:[J].Metallofiz. Noveishie Tekhnol.(IF 0.108), 2019, Vol.41 (6), pp.733-749
摘要:A sputtering device for deposition of multicomponent high-entropy metallic coatings with increased protective properties is proposed. The device is based on magnetron sputtering and hollow cathode effect with the sputtering target in the form of a composite rod. Application of th...

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