国际光学工程学会
期刊
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作者:Xiaohong Sun , Han Wang ...
来源:[J].Optical Engineering(IF 0.88), 2018, Vol.57 (5), pp.051503-051503SPIE
摘要:This work proposes to measure the topography of microstructure surfaces using a self-mixing interference (SMI) configuration. The theoretical measurement model is built using beam-expanded plane wave method and considering SMI effect. The interference patterns for different objec...

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