国际光学工程学会
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作者:Xiao Luo , Hai-xiang Hu ...
来源:[J].Optical Engineering(IF 0.88), 2017, Vol.56 (8), pp.084101-084101SPIE
摘要:A feasible way to improve the manufacturing efficiency of large reaction-bonded silicon carbide optics is to increase the processing accuracy in the ground stage before polishing, which requires high accuracy metrology. A swing arm profilometer (SAP) has been used to measure...
作者:Xiao Luo , Zhenyu Liu ...
来源:[J].Optical Engineering(IF 0.88), 2016, Vol.55 (7), pp.074108-074108SPIE
摘要:The swing arm profilometer (SAP) has been playing a very important role in testing large aspheric optics. As one of most significant error sources that affects the test accuracy, misalignment error leads to low-order errors such as aspherical aberrations and coma apart from ...

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