剑桥大学出版社期刊
期刊
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作者:Manuel Rivas , Varun Vyas ...
来源:[J].Journal of Materials Research(IF 1.713), 2015, Vol.30 (3), pp.429-441Cambridge U Press
摘要:Microelectromechanical systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in situ. Atomic force microscopy (AFM) is well suited for...

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