Springer期刊
期刊
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作者:... Hong-Beom Kwon , Hye-Rin Ahn , Yong-Jun Kim
来源:[J].Micro and Nano Systems Letters, 2017, Vol.5 (1), pp.1-5Springer
摘要:Abstract(#br)We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co micro-probes in terms of the mechanical performan...

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