国际光学工程学会
期刊
会议
图书
作者:Hai-xiang Hu , Zhi-yu Zhang ...
来源:[J].Optical Engineering(IF 0.88), 2017, Vol.56 (8), pp.084101-084101SPIE
摘要:A feasible way to improve the manufacturing efficiency of large reaction-bonded silicon carbide optics is to increase the processing accuracy in the ground stage before polishing, which requires high accuracy metrology. A swing arm profilometer (SAP) has been used to measure...

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