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作者:Prem Pal , Kazuo Sato
来源:[J].Micro and Nano Systems Letters, 2015, Vol.3 (1), pp.1-42Springer
摘要:Abstract(#br)Wet anisotropic etching based silicon micromachining is an important technique to fabricate freestanding (e.g. cantilever) and fixed (e.g. cavity) structures on different orientation silicon wafers for various applications in microelectromechanical systems (MEMS). {1...
作者:Youngkee Eun , Jongbaeg Kim , Liwei Lin
来源:[J].Micro and Nano Systems Letters, 2014, Vol.2 (1), pp.1-5Springer
摘要:Abstract(#br)The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A ...
作者:Ryan C Gough , Andy M Morishita , Jonathan H Dang ...
来源:[J].Micro and Nano Systems Letters, 2015, Vol.3 (1), pp.1-9Springer
摘要:Abstract(#br)A low-voltage, low-power method of electrically deforming a liquid-metal droplet via the direct manipulation of its surface tension is presented. By imposing a quasi-planar geometry on the liquid metal, its sensitivity to electrocapillary actuation is increased by mo...
作者:Jung-Hoon Yang , Hyun Tae Kim , Hanseup Kim
来源:[J].Micro and Nano Systems Letters, 2014, Vol.2 (1), pp.1-10Springer
摘要:Abstract(#br)This paper presents an electrochemical sensing approach that enables quantitative detection of three major catecholamine hormones from a mixture by specifically employing a chemically-modified microelectrode array with α-, β- and γ-cyclodextrin (CD) ‘catche...
作者:Youngsam Yoon , Daeyoung Kim , Jeong-Bong Lee
来源:[J].Micro and Nano Systems Letters, 2014, Vol.2 (1), pp.1-18Springer
摘要:Abstract(#br)Non-wetting super-hydrophobic or super-lyophobic surfaces are of great interest in a variety of applications. Natural water repelling surfaces show micro-/nano- combined hierarchical structure which shows extremely low wettability and self-cleaning characteristics. I...
作者:Luciano Sio , Giulio Caracciolo , Ferdinanda Annesi ...
来源:[J].Micro and Nano Systems Letters, 2015, Vol.3 (1), pp.1-9Springer
摘要:Abstract(#br)An ingenious combination of plasmonic nanomaterials and one of the most relevant biological systems, deoxyribonucleic acid (DNA) is achieved by bioconjugating gold nanorods (GNRs) with DNA via electrostatic interaction between positively charged GNRs and negatively c...
作者:Haekwan Oh , Ki Jung Lee , Keekeun Lee ...
来源:[J].Micro and Nano Systems Letters, 2015, Vol.3 (1), pp.1-10Springer
摘要:Abstract(#br)This review gives an overview of the development of surface acoustic wave (SAW) based gyroscopes. Different types of SAW based gyroscope are first presented, which are categorized into standing-wave based or progressive-wave based gyroscopes according to their respec...
作者:Sangmin Lee , In Ho Choi , Young Kwon Kim ...
来源:[J].Micro and Nano Systems Letters, 2014, Vol.2 (1), pp.1-7Springer
摘要:Abstract(#br)This paper introduces a pneumatic dispensing system to control the velocity of nanoliter droplets with small variation of volume. The system consists of a flexible membrane integrated with a backflow stopper. This unique dispensing mechanism can control the velocity ...
作者:Min-Wu Kim , Yong-Ha Song , Seung-Deok Ko ...
来源:[J].Micro and Nano Systems Letters, 2014, Vol.2 (1), pp.1-5Springer
摘要:Abstract(#br)An ultra-low voltage microelectromechanical system (MEMS) switch for low-power integrated circuit (IC) applications is proposed, fabricated and demonstrated. The folded hinge structure allows a large beam structure to be suspended with a designed air gap, effect...
作者:Ali Attaran , Rashid Rashidzadeh
来源:[J].Micro and Nano Systems Letters, 2015, Vol.3 (1), pp.1-4Springer
摘要:Abstract(#br)In this brief a new low actuation voltage RF MEMS switch is presented which can be integrated and controlled with available CMOS technologies. Despite the advantages in the design of RF MEMS switches designing a low actuation voltage RF MEMS switch is still a ch...

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