全部文献期刊会议图书|学者科研项目
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作者:Na Cai , Nabil Anwer , Paul J. Scott ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.62, pp.282-295
摘要:Abstract(#br)In ISO Geometrical Product Specifications and Verification Standards (GPS), Feature operations are used to obtain ideal and non-ideal features. The formalization of such operations enables to reduce ambiguity and uncertainty within the activities of design, manufactu...
作者:Xiaolei Bi , Yongbin Zeng , Ningsong Qu
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.61, pp.14-22
摘要:Abstract(#br)High-quality pure-nickel microstructures, which are characterized with multiple superior machining indicators, including machining homogeneity, machining surface roughness, and machining round edge, are now highly anticipated in the field of micromachines and microsy...
作者:Urara Satake , Sena Harada , Toshiyuki Enomoto
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.62, pp.30-39
摘要:Abstract(#br)In semiconductor device fabrication, surface flatness of silicon wafers has a significant impact on the chip yield. Hence, there is a strong demand to prevent the deterioration in surface flatness near the wafer edge due to edge roll-off during polishing. In the pres...
作者:Sangjin Maeng , Sangkee Min
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.63, pp.94-104
摘要:Abstract(#br)This paper presents a method to identify the position independent geometric errors of rotary axis and tool setting simultaneously using on-machine measurement. Reducing geometric errors of an ultra-precision five-axis machine tool is a key to improve machining accura...
作者:Heebum Chun , JaeMin Han , Lesley Wright ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.63, pp.33-40
摘要:Abstract(#br)This paper introduces a novel pressure-fed mechanism that can correct or compensate for motions and dynamic behavior and characteristics of compliant mechanism-based nanopositioning stages. The nanopositioning stages with double compound spring structures are typical...
作者:Meiyun Chen , Shengli Xie , Heng Wu ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.62, pp.62-70
摘要:Abstract(#br)To investigate the application of the multi-beam angle sensor (MBAS) to high-precision optical aspheric and freeform surfaces, which are critical components in optical systems, we present a method of using an MBAS to reconstruct an aspheric surface from angle data. T...
作者:F. Hojati , A. Daneshi , B. Soltani ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.62, pp.1-9
摘要:Abstract(#br)Capability of Additive Manufacturing (AM) technology in the production of complex parts with high flexibility has led to the growing interest in their application as an alternative for conventional manufacturing processes. Despite the outstanding benefits of the...
作者:Kazuki Tachibana , Masaki Michihata , Kiyoshi Takamasu ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.61, pp.93-102
摘要:Abstract(#br)We propose a new method of inspecting a surface for fine defects that combines the optical inspection method with observation of the physical behavior of a liquid. A liquid thin film on a substrate behaves as a near-field physical probe that autonomously captures nan...
作者:Minni Qu , Yunliang Shen , Liying Wu ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.62, pp.10-15
摘要:Abstract(#br)Focused ion beam (FIB) milling has been used for fast prototyping of lithium niobate (LiNbO 3 , LN) devices with feature size from sub-to hundreds of micrometers. However, a promising and challenging depth range of tens-of-nanometers or below is rarely attended. More...
作者:T. Roy , T.P. Sabharwal , M. Kumar ...
来源:[J].Precision Engineering(IF 1.393), 2020, Vol.61, pp.55-64
摘要:Abstract(#br)Water-repellent surfaces have recently become an active area of research due to the desire to achieve self-cleaning, anti-sticking, and non-wetting properties on surfaces. These surfaces are required for different engineering applications. A superhydrophobic (SH...

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