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作者:... Y.Z. Zhang , N. Huang , Y.X. Leng
来源:[J].Vacuum(IF 1.53), 2020, Vol.173Elsevier
摘要:Abstract(#br)Silver (Ag)-doped diamond-like carbon (Ag-DLC) films were deposited on the Si wafer and Co–Cr–Mo alloy substrates using a high-power pulsed plasma vapor deposition technique with a mosaic silver-graphite target. The Ag content (0–2.99 at. %) in the carbon f...
作者:... C.Z. Chen , Y.X. Leng , N. Huang
来源:[J].Vacuum(IF 1.53), 2019, Vol.160, pp.226-232Elsevier
摘要:Abstract(#br)Owing to its high ionization degree, high power pulsed magnetron sputtering (HPPMS) has proven advantageous for Cu film growth. In this study, Cu films with different thicknesses deposited by HPPMS at different peak powers were prepared. Moreover, a titanium (Ti) int...
作者:... K. Silins , N. Huang , Y.X. Leng
来源:[J].Vacuum(IF 1.53), 2018Elsevier
摘要:Abstract(#br)Low surface roughness, low residual stress, and (002) textured aluminum nitride (AlN) thin films are favored for applications in microelectronic and optoelectronic devices. In this paper, AlN thin films were deposited by reactive high power pulsed magnetron sputterin...
作者:... H. Sun , Y.X. Leng , N. Huang
来源:[J].Vacuum(IF 1.53), 2017, Vol.135, pp.93-100Elsevier
摘要:Abstract(#br)Copper (Cu) has been proposed as a well-known material for metallization in Si-based semiconductor devices because of its low resistivity, high chemical stability, and excellent electromigration resistance. In order to improve the properties of Cu films further,...
作者:... David N. Ruzic , Nan Huang , Y.X. Leng
来源:[J].Vacuum(IF 1.53), 2018, Vol.150, pp.144-154Elsevier
摘要:Abstract(#br)Ti films are widely used in electrical engineering, biomedical instrumentation, and other industries owing to their excellent material properties. High Power Pulsed Magnetron Sputtering (HPPMS) is a promising physical vapor deposition (PVD) technique used for produci...
作者:... R. Shen , N. Huang , Y.X. Leng
来源:[J].Diamond & Related Materials(IF 1.709), 2020, Vol.102Elsevier
摘要:Abstract(#br)Diamond-like carbon (DLC) films have good lubrication properties, and the structure of wear debris or tribolayer at the friction interface affect the friction behavior of DLC films. In the present work, Cu-doped hydrogenated DLC (Cu-DLC:H) films with Cu contents of 3...
作者:Y.X. Leng , J. Wang ...
来源:[J].Surface & Coatings Technology(IF 1.941), 2019, Vol.363, pp.430-435Elsevier
摘要:Abstract(#br)Titanium oxide (Ti-O) films with different thicknesses were deposited on 316 L stainless steel and bare metal stents with the filtered cathodic vacuum arc technique. The adhesion of the Ti-O films with different thicknesses on the 316 L stainless steel sheets was stu...
作者:... T.F. Zhang , Y.X. Leng , Nan Huang
来源:[J].Vacuum(IF 1.53), 2013, Vol.92, pp.39-43Elsevier
摘要:Abstract(#br)Due to renewed interest in hard-on-hard prosthetic joint replacements, especially metal-on-metal (MOM) and ceramic-on-metal joints (COM), concerns about debris and released metal ions from wear and mechanical-enhanced electrochemical (tribocorrosion) processes have r...
作者:... Y.B. Guo , Y.X. Leng , N. Huang
来源:[J].Materials Science & Engineering C(IF 2.404), 2017, Vol.75, pp.854-862Elsevier
摘要:Abstract(#br)Graphitization occurs during the long-term service of a diamond-like carbon (DLC) modified artificial joint. Then, DLC wear debris, which are carbon particles with different sp 2 /sp 3 ratios and sizes ranging from the nano- to micro-meter scale produced. In this pap...
作者:... H. Sun , Y.X. Leng , N. Huang
来源:[J].Vacuum(IF 1.53), 2012, Vol.86 (12), pp.2114-2119Elsevier
摘要:Abstract(#br)Surface modification with high-power glow discharges is a promising physical vapor deposition (PVD) technology for industrial usage. A metal ion density higher than 10 18 m −3 can be obtained due to a high-power input in the plasma. In the present paper, titaniu...

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