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作者:... N.E. Lee , G.Y. Yeom , Y.W. Ko
来源:[J].Surface & Coatings Technology(IF 1.941), 2000, Vol.131 (1), pp.196-200
摘要:Abstract(#br)Tin-doped indium oxide (ITO) thin films were deposited on polyethylene terephthalate (PET) at room temperature by oxygen ion beam assisted evaporator system and the effects of oxygen gas flow rate on the properties of room temperature ITO thin films were investi...
作者:... S.H. Chae , Y.W. Ko , G.Y. Yeom
来源:[J].Thin Solid Films(IF 1.604), 2003, Vol.447, pp.100-104
摘要:Abstract(#br)In this study, the etch characteristics of 6H–SiC were investigated in magnetically-enhanced SF 6 inductively-coupled-plasmas (ICP) with and without magnetic field. The etch characteristics of various metal films such as Ni, Al and Cu were also investigated to a...
作者:... Y.J. Lee , Y.W. Ko , G.Y. Yeom
来源:[J].Surface & Coatings Technology(IF 1.941), 2003, Vol.177, pp.705-710
摘要:Abstract(#br)In this study, the effects of plasma cleanings on the outgassing and surface characteristics of a MgO layer used for plasma display panel were investigated. As the plasma cleaning methods, an atmospheric pressure cleaning with He/O 2 /Ar/N 2 and a low pressure i...
作者:Y.W. Ko , Y.O. Ahn ...
来源:[J].MRS Proceedings, 1995, Vol.396
摘要:Abstract The initial nucleation stages of sp3 bonded amorphous diamond on silicon substrates have been investigated. The energy of the incident carbon ions/atoms is understood as a key parameter for the vapor phase formation of amorphous diamond like carbon coatin...
作者:Y.W. Ko , Y. Park
来源:[J].MRS Proceedings, 1995, Vol.396
摘要:Abstract A novel rectilinear negative carbon ion beam source for large-area coatings has been developed, based on SKION's Solid State Ion Beam Technology. The negative carbon ion beam is effectively produced by a primary cesium ion bombardment and the secondary negative carbon io...
作者:Y.W. Ko , M.H. Sohn
来源:[J].MRS Proceedings, 1995, Vol.396
摘要:Abstract A compact negative metal ion beam source for direct low energy metal ion beam depositions studies in ultra high vacuum (UHV) environment, has been developed. The ion source is based on SKION's Solid State Ion Beam Technology. The secondary negative metal ion beam is...

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