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作者:... Jeffrey S. Pulskamp , Ronald G. Polcawich , Kenn R. Oldham
来源:[J].International Journal of Intelligent Robotics and Applications, 2017, Vol.1 (2), pp.180-194
摘要:Millimeter-scale micro-robotic leg actuators are described that integrate thin-film lead zirconate titanate (PZT) piezoelectric actuation with compliant structures formed from parylene-C polymer. Models for out-of-plane rotation using piezoelectric cantilevers and in-plane r...
作者:Ronald G. Polcawich , Mark Aindow
来源:[J].Thin Solid Films(IF 1.604), 2017, Vol.638, pp.127-137
摘要:Abstract(#br)This study examines the effects of sputter deposition growth conditions on IrO 2 thin films developed as electrode layers for Pb(Zr x Ti 1- x )O 3 piezoelectric Micro-Electro-Mechanical Systems applications. For IrO 2 thin-film bottom electrodes sputter deposite...
作者:Ronald G. Polcawich , Daniel M. Potrepka
来源:[J].Journal of Crystal Growth(IF 1.552), 2018, Vol.493, pp.45-50
摘要:Abstract(#br)The annealing behavior and electrical properties of lead titanate (PTO) and lead zirconate titanate (PZT) thin films deposited by atomic layer deposition (ALD) were investigated. ALD films were deposited on platinized silicon substrates. The composition of the P...
作者:... Joel P. Martin , Ronald G. Polcawich , Ioannis Chasiotis
来源:[J].Acta Materialia(IF 3.941), 2016, Vol.112, pp.390-402
摘要:Abstract(#br)The elastic/plastic mechanical behavior of freestanding polycrystalline {111}-textured Pt films with thicknesses 50–1000 nm and different combinations of grain size and film thickness, grown epitaxially on a 35–50 nm thick polycrystalline (100)-TiO 2 (rutile) se...
作者:Ronald G. Polcawich , Evan R. Glaser ...
来源:[J].Scientific Reports(IF 2.927), 2017, Vol.7 (24), pp.151-168
摘要:Abstract(#br)The ability to tailor the performance of functional materials, such as semiconductors, via careful manipulation of defects has led to extraordinary advances in microelectronics. Functional metal oxides are no exception – protonic-defect-conducting oxides find ...
作者:... Ryan Q. Rudy , Ronald G. Polcawich , Don L. DeVoe
来源:[J].Sensors & Actuators: A. Physical(IF 1.841), 2012, Vol.188, pp.305-311
摘要:Abstract(#br)An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realiza...
作者:Ronald G. Polcawich , Jeffrey S. Pulskamp ...
来源:[J].Acta Materialia(IF 3.941), 2010, Vol.59 (3), pp.1141-1149
摘要:Abstract(#br)Mechanisms to explain the unique mechanical behavior of nanograined metals focus primarily on grain and grain boundary mobility. In most nanograined metal materials systems (both pure and alloyed) it has not been possible to decouple these time- and cycle-depend...
作者:... Steven Isaacson , Ronald G. Polcawich , Ioannis Chasiotis
来源:[J].Journal of the American Ceramic Society(IF 2.107), 2018, Vol.101 (7), pp.2965-2975
摘要:Abstract(#br)The high and low field ferroelectric response of freestanding PbZr0.52Ti0.48O3 ( PZT ) films, with texture varying from 100% (001) to 100% (111) was investigated via 500 nm thick PZT unimorphs deposited on the same substrate. It ...
作者:... Susan Trolier-McKinstry , Ronald G. Polcawich , Jacob L. Jones
来源:[J].Materials & Design, 2016, Vol.111, pp.429-434
摘要:Abstract(#br)Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorien...

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