全部文献期刊学位论文会议报纸专利标准年鉴图书|学者科研项目
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作者:B Schröder , S Bauer
来源:[J].Journal of Non-Crystalline Solids(IF 1.597), 2000, Vol.266, pp.115-119Elsevier
摘要:Abstract(#br)In this paper we present some experimental results which support the hypothesis that different film forming radicals (precursors) are responsible for the deposition of hydrogenated amorphous silicon (a-Si:H) films by the plasma enhanced chemical vapor deposition...
作者:... Frank Diehl , U Weber , B Schröder
来源:[J].Thin Solid Films(IF 1.604), 2001, Vol.395 (1), pp.202-205Elsevier
摘要:Abstract(#br)In this paper we report the synthesis of highly conducting doped hydrogenated micro-crystalline silicon films, prepared by Cat-CVD deposition using silane and trimethyl boron (TMB) with hydrogen dilution at substrate temperatures as low as 110°C, having a conduc...
作者:... S Bauer , R.O Dusane , B Schröder
来源:[J].Thin Solid Films(IF 1.604), 2001, Vol.395 (1), pp.116-120Elsevier
摘要:Abstract(#br)We present two different investigations showing the influence of hydrogen in hot-wire chemical vapor deposition (HWCVD). First, dissimilarities in the growth kinetics of hydrogenated amorphous silicon (a-Si:H) films by the plasma enhanced chemical vapor deposition (P...
作者:S Bauer , B Schröder , H Oechsner
来源:[J].Journal of Non-Crystalline Solids(IF 1.597), 1998, Vol.227, pp.34-38Elsevier
摘要:Abstract(#br)In this study, we present in situ kinetic and spectroscopic ellipsometry investigations concerning the growth and microstructure of hydrogen (H)-diluted hot-wire (HW) deposited amorphous hydrogenated silicon (a-Si:H). A comparison of the results obtained for HW-films...
作者:... S Bauer , B Schröder , H Oechsner
来源:[J].Thin Solid Films(IF 1.604), 2001, Vol.395 (1), pp.121-124Elsevier
摘要:Abstract(#br)This paper reports the results of detailed experiments carried out to understand the growth of a-Si:H films deposited by thermocatalytic chemical vapor deposition (TCCVD) at different substrate temperatures ( T s ). Kinetic ellipsometry data reveal that the grow...
作者:A Pflüger , C Mukherjee , B Schröder
来源:[J].Solar Energy Materials and Solar Cells(IF 4.63), 2002, Vol.73 (3), pp.321-337Elsevier
摘要:Abstract(#br)Scale-up of a-Si:H-based thin film applications such as solar cells, entirely or partly prepared by hot-wire chemical vapor deposition (HWCVD), requires research on the deposition process in a large-area HWCVD system. The influence of gas supply and filament geo...
作者:... R.O Dusane , S Bauer , B Schröder
来源:[J].Journal of Non-Crystalline Solids(IF 1.597), 1998, Vol.227, pp.452-455Elsevier
摘要:Abstract(#br)Attempts to prepare undoped microcrystalline ( μ c) SiC:H alloy films by the recently developed hot wire chemical vapour deposition (HWCVD) technique have been made. Gas mixtures of SiH 4 +CH 4 and SiH 4 +C 2 H 2 with no hydrogen dilution have been used during d...
作者:... U Weber , H Seitz , B Schröder
来源:[J].Thin Solid Films(IF 1.604), 2001, Vol.395 (1), pp.310-314Elsevier
摘要:Abstract(#br)We report on the growth of highly conducting p-μc-Si:H films by hot-wire CVD. A systematic variation of the doping gas (trimethylboron) ratio was first carried out. High dark conductivity, σ D ≈1.0 Ω −1 cm −1 and low activation energy of dark conductivity, ...
作者:B Schröder , K Jung
来源:[J].Thin Solid Films(IF 1.604), 2001, Vol.398, pp.465-470Elsevier
摘要:Abstract(#br)The Brillouin light scattering (BLS) technique is used to observe thermally excited acoustic surface phonons in backscattering geometry. A series of DC sputtered ITO films with thicknesses ranging from 31 to 3600 nm were deposited at a substrate temperature of 1...

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