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作者:Andrew Findlay , Lubek Jastrzebski
来源:[J].Materials Science in Semiconductor Processing(IF 1.338), 2006, Vol.9 (1), pp.252-256Elsevier
摘要:Abstract(#br)We present an electric characterization method for monitoring dielectrics on miniature 50 μm×70 μm scribe line test sites of semiconductor IC product wafers. The method is an extension to micro-scale of the corona–Kelvin metrology used for much larger sites...
作者:... John D’Amico , Andrew Findlay , Jacek Lagowski
来源:[J].Journal of Electronic Materials(IF 1.635), 2010, Vol.39 (6), pp.642-647Springer
摘要:Abstract(#br)In crystalline silicon, above-bandgap illumination can transform defects into strong recombination centers, degrading minority-carrier lifetime and solar cell efficiency. This light-induced degradation (LID) is due primarily to boron–oxygen and iron–boron defect...
作者:Andrew Findlay , Lubek Jastrzebski
来源:[J].MRS Proceedings, 2006, Vol.917Cambridge U Press
摘要:Abstract In-line monitoring of the electrical properties of high-k dielectrics in logic or memory fab-lines has become increasingly important in the semiconductor industry. Non-contact corona-Kelvin based metrology can be used to affectively monitor in-line key dielectric pr...
作者:Andrew Findlay
来源:[J].Canadian Geographic, 2019, Vol.139 (2)ProQuest
作者:Andrew Findlay , Marshall Wilson ...
来源:[J].Solid State Phenomena, 2016, Vol.4182, pp.472-477Trans Tech
摘要:Non Visual Defects (NVD) is a category of defects that cause electrical failures but are not detected with visual wafer inspection tools. Our approach for NVD detection is based on the Kelvin probe surface voltage mapping technique. The detection of defects is enhanced using fiel...
作者:Andrew Findlay , Jacek Lagowski ...
来源:[J].Materials Science Forum, 2016, Vol.3999, pp.353-356Trans Tech
摘要:Kelvin-probe surface voltage mapping, SVM, on epitaxial SiC, charged with corona into deep depletion, reveals SV defects manifested as spots with decreased surface voltage. For 150μm thick epi-layer, SV defects coincide with low carrier lifetime spots revealed by microwave d...

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