全部文献期刊会议图书|学者科研项目
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作者:Sirui Tang , Weigen Chen , Lingfeng Jin ...
来源:[J].Sensors and Actuators: B. Chemical(IF 3.535), 2020
摘要:Abstract(#br)MEMS gas sensor arrays and specially designed pattern recognition systems are the main research directions in the field of modern sensing technology in the engineering, especially in the smart sensing and monitoring of faults in large power equipment such as oil-imme...
作者:Xiaolong Lv , Xiao Zhao , Yongqing Wang ...
来源:[J].AEUE - International Journal of Electronics and Communications(IF 0.551), 2020
摘要:Abstract(#br)This paper presents a low-power second-order sigma-delta modulator (SDM) for micro-electromechanical systems (MEMS) digital geophones (DGPs). The proposed SDM optimizes the performance of the first stage integrator and uses an adaptive class-AB current recycling o...
作者:M. Zamanzadeh , I.Jafarsadeghi Pournaki , S. Azizi
来源:[J].International Journal of Mechanical Sciences(IF 1.613), 2020
摘要:... While the particular system of interest is one with generated levitation force, the results can be applied to a wide class of MEMS in which the governing equation of motion is classified as the forced Mathieu equation. Coordinate transformation of the systems’ analytica...
作者:Yasser Mafinejad , Abbas Kouzani , Khalil Mafinezhad ...
来源:[J].The International Journal of Advanced Manufacturing Technology(IF 1.205), 2017, Vol.93 (1-4), pp.661-670
摘要:Micro electromechanical system (MEMS) shunt capacitive switches behave chiefly as a capacitor at both up and down states. Therefore, input-output matching for these switches is affected by varying the frequency. Although increasing the amount of capacitance at the up state re...
作者:Ugur Soysal , Frédéric Marty , Evelyne Géhin ...
来源:[J].Microelectronic Engineering(IF 1.224), 2020, Vol.221
摘要:Abstract(#br)In this study, we propose to realize high-performance inertial Micro-Electro-Mechanical Systems (MEMS) mass sensors by the thick oxide as a mask layer fabrication technique. This method enables to reduce the air-gap to sub-μm in capacitively transduced MEMS with...
作者:M. De Matteis , A. Pezzotta , M. Sabatini ...
来源:[J].Analog Integrated Circuits and Signal Processing(IF 0.553), 2017, Vol.92 (3), pp.453-465
摘要:This paper presents a low power read-out front-end for 3-axis MEMS capacitive accelerometer. The front-end includes the analog preamplifier (to sense the signal coming from the MEMS) and a Successive-Approximation 10b A/D Converter, for digitalization and off-chip digital-sig...
作者:Tzu-Hsuan Chang , Daniel Struk , Milad Navaei ...
来源:[J].Sensors and Actuators: B. Chemical(IF 3.535), 2020, Vol.307
摘要:... The MEMS-column is fabricated in all silicon materials, with an integrated platinum resistive heater and temperature sensors. This design enables low power operation and rapid temperature heating, which are both useful for temperature programmed separations. The ion trap mass...
作者:Yoshio Mita , Naoyuki Sakamoto , Naoto Usami ...
来源:[J].Sensors & Actuators: A. Physical(IF 1.841), 2018, Vol.275, pp.75-87
摘要:Abstract(#br)This paper presents a versatile chip-level wireless driving method for microelectromechanical system (MEMS) actuators. A MEMS actuator is integrated as an electrical component of a coupled LCR resonant circuit, and it rectifies the energy sent through an ultrahigh-...
作者:Yu Pei , Weidong Wang , Guojun Zhang ...
来源:[J].Sensors & Actuators: A. Physical(IF 1.841), 2018
摘要:Abstract(#br)In view of low sensitivity of traditional stethoscope and valuableness of existing intelligent electronic stethoscope, a T-type MEMS heart sound sensor with high sensitivity, low cost and high SNR is designed, which is combined with MEMS technology, bionic principle,...
作者:Hyun-Ung Oh , Tae-Gyu Kim , Sung-Hyeon Han ...
来源:[J].Acta Astronautica(IF 0.701), 2017, Vol.131, pp.28-35
摘要:Abstract(#br)One of the most significant barriers encountered to the space application of MEMS technology is its lack of reliability and flight heritage in space environments. In this study a MEMS solid propellant thruster array was selected for the verification test of MEMS tech...

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