国际光学工程学会
期刊
会议
图书
作者:Karolina Czarnacka , F. F. Komarov
来源:[C].Symposium on Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments (WILGA)2016SPIE
摘要:In this paper measurements results of electrical and optical properties of SiNx thin layers are presented. Layers were produced by chemical vapor deposition on n-type (100)-oriented silicon substrates. Measurements were performed for samples directly after deposit...
作者:F. F. Komarov , O. I. Velichko ...
来源:[C].International Conference on Micro- and Nano-Electronics2006SPIE
摘要:The model of transient enhanced diffusion of ion-implanted As is formulated and the finite-difference method for numerical solution of the system of equations obtained is developed. The nonuniform distribution of point defects near the interface and a new description of arsenic c...

我们正在为您处理中,这可能需要一些时间,请稍等。

资源合作:cnki.scholar@cnki.net, +86-10-82896619   意见反馈:scholar@cnki.net

×